Multichip semiconductor device, chip therefor and method of formation thereof

ABSTRACT

A multichip semiconductor device is disclosed in which chips are stacked each of which comprises a semiconductor substrate formed on top with circuit components and an interlayer insulating film formed on the top of the semiconductor substrate. At least one of the chips has a connect plug of a metal formed in a through hole that passes through the semiconductor substrate and the interlayer insulating film. The chip with the connect plug is electrically connected with another chip by that connect plug.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a Continuation-in-Part application of U.S. patent applicationSer. No. 08/980,873, filed Dec. 1, 1997, the entire contents of whichare incorporated herein by reference.

BACKGROUND OF THE INVENTION

The present invention relates to a multichip semiconductor device usingmultiple chips.

The present invention also relates to a chip for a multichipsemiconductor device and a method of manufacture thereof.

Recent computers and communication equipment use for their importantsection a large-scale integrated circuit (chip) which has a great numberof electronic components, such as transistors, resistors, etc.integrated into a semiconductor substrate. Thus, the performance of theentire equipment depends largely on the performance of the chip.

On the other hand, so-called multichip semiconductor devices haveproposed, each having a plurality of chips to improve the wholeperformance of the equipment. FIGS. 1, 2 and 3 are sectional views ofconventional multichip semiconductor devices.

FIG. 1 shows a multichip semiconductor device of a type in which aplurality of chips 82 are placed side by side on a multilayeredinterconnection substrate 81. Reference numeral 83 denotes a solderbump.

FIG. 2 shows a multichip semiconductor device of a type in which chipsare connected together with their major surfaces opposed to each other.FIG. 3 shows a multichip semiconductor device of a type in which aplurality of chips 82 are stacked using stacking plates 84.

However, these conventional multichip semi-conductor devices have thefollowing problems.

In the multichip semiconductor device shown in FIG. 1, the plane area ofthe device increases because the chips 82 are arranged in the sameplane.

The conventional semiconductor device of FIG. 2 is free of the problemwith the device of FIG. 1 that the plane area of the device increases.This is because the chips 82 are stacked one above another. However, thedevice of FIG. 2 has a problem that the number of chips that can bestacked is limited to two. In addition, it is difficult to electricallytest each chip.

The conventional semiconductor device of FIG. 3 does not suffer from theproblems with the conventional semiconductor devices of FIGS. 1 and 2.However, its structure is complex, its thickness is great, and itsmanufacturing cost is high. This is because a stacking plate 84 need tobe provided between any two adjacent two chip.

BRIEF SUMMARY OF THE INVENTION

It is therefore an object of the present invention to provide amultichip semiconductor device which has a small plane area, a simplestructure, and a small thickness.

It is another object of the present invention to provide a chip whichmakes it possible to implement such a multichip semiconductor device andto provide a method of manufacturing the chip.

According to a first aspect of the present invention, there is provideda multichip semiconductor device having a stack of chips each having asemi-conductor substrate which has a surface on which circuit,components are formed and an interlayer insulating film formed on thesurface of the semi-conductor substrate, wherein at least one chip ofthe chips has a connect plug formed in a through hole which passesthrough the semiconductor substrate and a part of the interlayerinsulating film, and the one chip having the connect plug iselectrically connected with a another chip of the chips by the connectplug.

For example, the interlayer insulating film is a interlayer insulatingfilm of a first layer covered with the circuit component.

According to a second aspect of the invention, there is provided amultiple semiconductor device according to the first aspect, in whichthe another chip has a connect member that electrically connects withthe connect plug, and the connect member is, for example, a metal bump.

According to third aspect of the invention, there is provided a multiplesemiconductor device according to the first aspect, wherein the one chipand the another chip are electrically connected with each other througha packing member. The packing member is an interconnecting substrate orTAB tape.

According to a fourth aspect of the present invention, there is provideda chip for use in a multichip semiconductor device, comprising:

a semiconductor substrate having a surface on which circuit componentsare formed;

an interlayer insulating film formed on the surface of the semiconductorsubstrate; and

a connect plug made of a metal formed in a through hole that passesthrough a part of the interlayer insulating film and the semiconductorsubstrate and adapted to provide an electrical connection for anotherchip.

According to a fifth aspect of the invention, there is provided a chipaccording to the fourth aspect, wherein the connect plug comprises ametal plug formed in the through hole and an insulating film formedbetween the metal plug and a sidewall of the through hole.

According to a sixth aspect of the present invention, there is provideda chip according to the fourth aspect, wherein the connect plugcomprises a metal plug formed in the through hole and having a cavity,an insulating film formed between the metal plug and a sidewall of thethrough hole, and a low stress film formed in the cavity of the metalplug, the low stress film being smaller than the metal plug in thedifference in thermal expansion coefficient from the semiconductorsubstrate.

According to a seventh aspect of this invention, there is provided achip according to the fourth aspect, wherein the connect plug comprisesa metal plug formed in the through hole so that a space is left in thethrough hole on the top side of the semiconductor substrate, aninsulating film formed between the metal plug and the sidewall of thethrough hole, and a cap layer formed in the space in the through hole.

According to an eighth aspect of the invention, there is provided a chipaccording to the fourth aspect, wherein the connect plug comprises ametal plug formed in the through hole so that a space is left in thethrough hole on the rear side of the semiconductor substrate, aninsulating film formed between the metal plug and a sidewall of thethrough hole, and a connect member formed in the space in the throughhole.

The rear side of the semiconductor substrate on the connect member sideis preferably coated with an insulating film except the area of theconnect member.

According to a ninth aspect of the present invention, there is provideda method of forming a chip for use in a multichip semiconductor device,comprising the steps of:

forming circuit components on a surface of semiconductor substrate;

forming an interlayer insulating film over the major surface of thesemiconductor substrate;

selectively etching the interlayer insulating film and the semiconductorsubstrate to form a hole that passes through the interlayer insulatingfilm but not the semiconductor substrate;

forming an insulating film on the sidewall and bottom of the hole to athickness that does not fill up the hole;

filling the hole covered with the insulating film with a metal to form ametal plug; and

processing a rear side of the semiconductor substrate to thereby exposethe metal plug at the bottom of the hole.

According to a tenth aspect of the invention, there is provided a methodaccording to the ninth aspect, wherein the hole is formed prior to theformation of an interconnection layer which, of interconnection layersto be formed above the semiconductor substrate, has the lowest meltingpoint.

According to an eleventh aspect of the present invention, there isprovided a method according to the ninth aspect, in which the step ofprocessing the rear side of the semiconductor substrate is performedafter the semiconductor substrate has been cut out from a wafer.

According to a twelfth aspect of the present invention, there isprovided a method of forming a chip for use in a multichip semiconductordevice, comprising the steps of:

manufacturing circuit components on a surface of semiconductor substrateusing integrated-circuit techniques;

forming an interlayer insulating film on the surface of thesemiconductor substrate;

selectively etching the interlayer insulating film and the semiconductorsubstrate to form a hole that passes through the interlayer insulatingfilm but not the semiconductor substrate;

forming a first insulating film on a sidewall and bottom of the hole toa thickness that does not fill up the hole;

filling the hole with a second insulating film which has a higher etchrate than the first insulating film;

forming a contact hole in the interlayer insulating film and forming aninterconnection layer that connects with the circuit components throughthe contact hole;

processing a rear side of the semiconductor substrate and the firstinsulating film in the hole to expose the second insulating film at thebottom of the hole;

etching away the second insulating film in the hole; and

filling the hole covered with the first insulating film with a metal toform a metal plug.

According to a thirteenth aspect of the invention, there is provided amethod according to the twelfth aspect, in which the rear side of thesemiconductor substrate is processed after the semiconductor substratehas been cut out from a wafer.

According to a fourteenth aspect of the present invention, there isprovided a method of forming a chip for use in a multichip semiconductordevice, comprising, the steps of:

manufacturing circuit components on a semi-conductor substrate usingintegrated-circuit techniques;

forming an interlayer insulating film over a surface of thesemiconductor substrate;

selectively etching the interlayer insulating film and the semiconductorsubstrate to form a hole that passes through the interlayer insulatingfilm but not the semiconductor substrate;

forming a first insulating film on a sidewall and bottom of the hole toa thickness that does not fill up the hole;

filling the hole covered with the first insulating film with a metal toform a metal plug;

process a rear side of the semiconductor substrate to expose the firstinsulating film at the bottom of the hole;

selectively etching the rear side of the semiconductor substrate untilthe first insulating film on the sidewall of the hole which is above thefirst insulating film at the bottom of the hole is exposed;

forming a second insulating film over the entire rear side of thesemiconductor substrate; and

etching the first and second insulating films until the metal plug atthe bottom of the hole is exposed, thereby selectively remaining thesecond insulating film on the rear side of the semiconductor substratein the side of the bottom of the hole.

According to a fifteenth aspect of this invention, there is provided amethod according to the fourteenth aspect, in which the hole is formedprior to the formation of an interconnection layer which, ofinterconnection layers to be formed above the semiconductor substrate,has the lowest melting point.

According to a sixteenth aspect of the invention, there is provided amethod according to the fourteenth aspect, in which the step ofprocessing the rear side of the semiconductor substrate is performedafter the semiconductor substrate has been cut out from a wafer.

According to a seventeenth aspect of the invention, there is provided asemiconductor chip for use in a multichip semiconductor devicecomprising:

a semiconductor substrate formed on a circuit components;

a first interlayer insulating film formed on the semiconductorsubstrate;

a second insulating film formed on a sidewall of a through hole thatpasses through the first insulating film and the semiconductorsubstrate;

a metal plug that fills up the through hole;

a second interlayer insulating film formed on the first interlayerinsulating film;

an interconnection layer formed on the metal plug;

a plug formed on the interconnection layer; and

a connect member formed on the plug to provide an electrical connectionfor another chip.

Unlike the conventional multichip semiconductor device in which aplurality of chips are arranged side by side, the present invention inwhich a plurality of chips are stacked has no problem that the planearea of the device increases.

Moreover, unlike the conventional multichip semiconductor device inwhich two chips are connected together with their major surfaces opposedto each other, the multichip semiconductor device of the presentinvention has no problem that the number of chips to be stacked islimited to two because the chips are connected together by means of themetal plugs that pass through the silicon substrate and the firstinterlayer insulating film.

Furthermore, unlike the conventional semiconductor device in which chipsare stacked with the aid of stacking plates, the semiconductor device ofthe present invention has no problems of complexity of the structure andincreased thickness because no stacking plate is used to connect thechips together.

The present invention can therefore provide a multichip semiconductordevice which has a small plane area, a simple structure, and a smallthickness.

A chip for use in a multichip semiconductor device of the presentinvention has a connect plug that is formed in a through hole thatpasses through the semiconductor substrate and the interlayer insulatingfilm and adapted to provide an electrical connection for another chip.

Therefore, the semiconductor device using such a chip has a small planearea, a simple structure, and a small thickness.

The connect plug has also the effect of radiating heat of the chip. Byputting a probe to the connect plug from the rear side of the chip, thedevice or chip can be tested.

In the present invention, the hole that passes through the semiconductorsubstrate and the interlayer insulating film is not formed immediately.This is because semiconductor substrates are generally not so thin as toallow the through hole to be formed immediately.

That is, in the present invention, a hole is formed first which passesthrough the interlayer insulating film but not the semiconductorsubstrate and then a metal film, serving as the connect plug, is formedin the hole with an insulating film interposed therebetween.

Following such processes, the rear side of the semiconductor substrateand the insulating film are processed until the metal film at the bottomof the hole is exposed, whereby the through hole that passes through thesemiconductor substrate and the insulating film is formed. Thus, even ifthe starting semiconductor substrate is thick, the through hole can beformed easily.

In the present invention, the contact hole is formed in the interlayerinsulating film in the state where the hole is filled with the secondinsulating film having a higher etch rate than the first insulating filmand the interconnection layer is formed which connects with the circuitcomponents through the contact hole. After that, the second insulatingfilm is selectively etched away to form the metal film in the hole.Thus, the metal film will not be affected by heat treatment for formingthe interconnection layer.

This prevents the degradation of characteristics of the chip due toingredients of the metal film diffusing into the semiconductorsubstrate. Unlike the case where a diffusion preventing structure, suchas a barrier, is formed so as to prevent the diffusion of theingredients of the metal film, there is no need for complicatedprocesses.

According to the present invention, the through hole can be formedeasily and the exposed surface of the semiconductor substrate on thehole bottom side is coated easily with the second insulating film.

The processing of the rear side of the semiconductor substrate bypolishing or etching is preferably performed after the chip has been cutout from a wafer. The reason is that it is difficult to uniformlyprocess the wafer, which is generally large and exhibits low mechanicalstrength.

According to an 18th aspect of the invention, there is provided amultichip semiconductor device comprising:

chips each having a semiconductor substrate on which devices areintegrally formed; and

a connecting substrate provided between adjacent two of the chips whichare vertically arranged,

wherein the vertically adjacent two chips are electrically connected viathe connecting substrate, a through-hole is formed in at least one ofthe semiconductor substrates, and a conductive plug is formed in thethrough-hole and connected to the connecting substrate.

The through-hole may be provided in either or both of the semiconductorsubstrates of the two chips.

According to a 19th aspect of the invention, a material of theconnecting substrate has higher radiation properties than a material ofeach chip.

Specifically, in the case of a Si chip, the connecting substrate isformed of an insulating material such as SiC.

According to 20th aspect of the invention, the connecting substratecomprises:

a connecting substrate body having the conductive plug formed in thethrough-hole passing through the connecting substrate; and

a high-thermal-conductivity member having a higher thermal conductivitythan the connecting substrate body.

Specifically, where the connecting substrate is formed of an insulatingmaterial such as SiC, the high-thermal-conductivity member is formed ofa metallic material such as W or Cu.

According to a 21st aspect of the invention, thehigh-thermal-conductivity member is a conductive plate formed within theconnecting substrate body.

In this case, a conductive plate may be provided on the surface of theconnecting substrate. In addition, the conductive plate may be providedboth within the connecting substrate and on the surface of theconnecting substrate.

According to a 22nd aspect of the invention, thehigh-thermal-conductivity member is a radiation fin provided on asurface of the connecting substrate body.

The radiation fin may be provided on each of all the connectingsubstrates, or only on a specific connecting substrate, e.g. aconnecting substrate with low radiation properties.

According to a 23rd aspect of the invention, there is provided amultichip semiconductor device comprising:

chips each having a semiconductor substrate on which devices areintegrally formed; and

a connecting substrate provided between adjacent two of the chips whichare vertically arranged,

wherein a through-hole is formed in the connecting substrate, and aconductive plug is formed in the through-hole,

each of the vertically adjacent two chips is electrically connected tothe conductive plug via bumps, and

the connecting substrate has heating units for heating the bumps.

According to a 24th aspect of the invention, there is provided amultichip semiconductor device comprising:

chips each having a semiconductor substrate on which devices areintegrally formed; and

a connecting substrate provided between adjacent two of the chips whichare vertically arranged,

wherein a through-hole is formed in the connecting substrate, and aconductive plug is formed in the through-hole,

the vertically adjacent two chips are electrically connected to eachother via the conductive plug, and

the connecting substrate is formed of a material having a thermalexpansivity substantially equal to a thermal expansivity of eachsemiconductor substrate.

The advantages of the above-described aspects of the invention will nowbe described.

According to the 18th aspect of the invention, since a plurality ofchips are stacked, the area in plan of the device can be reduced, unlikethe conventional multichip semiconductor device in which a plurality ofchips are arranged in a plane.

In addition, the chip in which conductive plug is formed may be situatedat the top or bottom of the device and thus the test probes can easilybe put in contact with the conductive plug. Therefore, inspections ofthe device can easily be performed.

According to the 20th to 22nd of the invention, the connecting substratehas a sufficiently higher radiation properties than the chip and theheat of the chip can be efficiently radiated to the outside through theconnecting substrates. Since the radiation properties of the device arethus improved, deterioration in operational characteristics of the chipand a decrease in life of the chip due to the heat produced in operationof the chip can be prevented.

According to the 23rd aspect of the invention, the bumps connected to adefective chip are melted by heater units of the connecting substrateand the defective chip can be separated from connecting substrate.Therefore, the repairs of the chip can easily be made. In particular,where the heating units of each connecting substrate can beindependently controlled, the repairs of the chip can be made moreeasily.

According to the 24th aspect of the invention, since the thermalexpansivity of the material of the connecting substrate is substantiallyequal to that of the material of the semiconductor substrate, there isno need to use the adhesive including the filler in order to make theirthermal expansivities close to each other.

Accordingly, even if the integration density of the chip furtherincreases and the distance between the connecting substrate and thesemiconductor substrate further decreases, there occurs no region whichis not filled with the adhesive. Therefore, reliable connection betweenthe chip and the connecting substrate is ensured, and thus reliableconnection between the upper and lower chips is ensured.

In the case where the thermal expansivity of the material of theconnecting substrate is nearly equal to that of the material of thesemiconductor substrate, no thermal strain occurs in the bumps even ifthe bumps are used to connect the connecting substrate and semiconductorsubstrate.

Accordingly, even if the integration density of the chip furtherincreases and the distance between the chip and the connecting substratefurther decreases, reliable connection between the connecting substrateand the semiconductor substrate is ensured, and thus reliable connectionbetween the upper and lower chips is ensured.

FIG. 35 is a table showing the thermal conductivity and linearexpansivity of principal materials of the semiconductor substrate usedfor chips and the connecting substrate.

In the present invention, if Si is used as material of the semiconductorsubstrate, Si is optimal as material of the connecting substrate withrespect to thermal strain, but silicon carbide (SiC) or aluminum nitride(AlN) having substantially the same linear expansivity as Si may also beused. Since SiC and AlN have a higher thermal conductivity than Si,these are excellent with respect to radiation properties, too.

If the semiconductor substrate used for the chip is formed of a compoundsemiconductor, e.g. gallium arsenic such materials as GaAs, beryllia(BeO) and alumina (Al₂O₃) are proper for the connecting substrate.

A tolerable difference in thermal expansivity depends on the size andpitch of the connection terminals (pads) and the size of the connectingsubstrate. In order to ensure reliable connection between the chips,which is aimed at by the invention, it is preferable that the differencebetween the thermal expansivity of the material of the connectingsubstrate and the thermal expansivity of the material of thesemiconductor substrate is within ±5.0×10⁻⁶.

Additional objects and advantages of the invention will be set forth inthe description which follows, and in part will be obvious from thedescription, or may be learned by practice of the invention. The objectsand advantages of the invention may be realized and obtained by means ofthe instrumentalities and combinations particularly pointed outhereinafter.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING

The accompanying drawings, which are incorporated in and constitute apart of the specification, illustrate presently preferred embodiments ofthe invention, and together with the general description given above andthe detailed description of the preferred embodiments given below, serveto explain the principles of the invention.

FIG. 1 shows a conventional multichip semi-conductor device;

FIG. 2 shows a conventional multichip semi-conductor device;

FIG. 3 shows a conventional multichip semi-conductor device;

FIG. 4 is a sectional view of a multichip semi-conductor deviceaccording to a first embodiment of the present invention;

FIG. 5 is a sectional view of a multichip semiconductor device accordingto a second embodiment of the present invention;

FIG. 6 is a sectional view of a multichip semiconductor device accordingto a third embodiment of the present invention;

FIGS. 7A through 7I are sectional views illustrating a method of forminga chip for a multichip semiconductor device according to a fourthembodiment of the present invention;

FIG. 8 is a sectional view of a multilayer interconnection in a regionwhere a through hole is formed;

FIG. 9 is a sectional view of a multilayer interconnection in a deviceregion;

FIGS. 10A through 10D are sectional views of metal plugs;

FIGS. 11A through 11D are sectional views illustrating another method offorming a through hole;

FIGS. 12A, 12B and 12C are sectional views illustrating other methods offorming a metal plug;

FIGS. 13A, 13B and 13C are sectional views illustrating still anothermethod of forming a metal plug;

FIGS. 14A, 14B, 14C and 14D are sectional views illustrating anothermethod of forming a connect plug;

FIG. 15 is a sectional view illustrating another structure forconnecting chips;

FIGS. 16A through 16F are sectional views illustrating still anothermethod of forming a connect plug;

FIGS. 17A and 178 are sectional views illustrating a method of forming achip for a multichip semiconductor device according to a fifthembodiment of the present invention;

FIG. 18 is a sectional view of a multichip semiconductor deviceaccording to a sixth embodiment of the present invention;

FIG. 19A is a sectional view of a multichip semiconductor deviceaccording to a seventh embodiment of the present invention;

FIG. 19B is an enlarged view of a portion of the semiconductor device ofFIG. 19A;

FIG. 20 is a sectional view of a multichip semiconductor deviceaccording to an eighth embodiment of the present invention;

FIG. 21 is a sectional view of a multichip semiconductor deviceaccording to a ninth embodiment of the present invention;

FIG. 22 is a diagram for use in explanation of a conventional multichipsemiconductor device using a TAB tape;

FIGS. 23A through 23F are sectional views illustrating a method ofmanufacturing a multichip semiconductor device according to a tenthembodiment of the present invention;

FIG. 24 is a sectional view illustrating a method of manufacturing amultichip semiconductor device according to an tenth embodiment of thepresent invention;

FIG. 25 is a sectional view of a multichip semiconductor deviceaccording to an eleventh embodiment of the present invention;

FIG. 26 is a sectional view of a multichip semiconductor deviceaccording to a 12th embodiment of the present invention;

FIG. 27 is a plan view showing a connecting substrate of the multichipsemiconductor device shown in FIG. 26;

FIGS. 28A and 28B show repairing of the multichip semiconductor deviceof FIG. 26;

FIG. 29 is a sectional view of a multichip semiconductor deviceaccording to a 13th embodiment of the present invention;

FIG. 30 is a sectional view of a multichip semiconductor deviceaccording to a 14th embodiment of the present invention;

FIG. 31 is a sectional view of a multichip semiconductor deviceaccording to a 15th embodiment of the present invention;

FIG. 32 is a sectional view of a multichip semiconductor deviceaccording to a 16th embodiment of the present invention;

FIG. 33 is a sectional view of a multichip semiconductor deviceaccording to a 17th embodiment of the present invention;

FIGS. 34A through 34H are sectional views illustrating a method offorming the multichip semiconductor device shown in FIG. 33; and

FIG. 35 is a table showing coefficients of thermal conductivity andlinear expansivities of principal materials of semiconductor substratesfor chips and connecting substrates.

DETAILED DESCRIPTION OF THE INVENTION

Hereinafter, the preferred embodiments of the present invention will bedescribed with reference to the accompanying drawings.

First Embodiment

Referring now to FIG. 4, there is illustrated in section a multichipsemiconductor device according to a first embodiment of the presentinvention.

This multichip semiconductor device is constructed such that three chips1 a, 1 b and 1 c are stacked. Each chip is constructed roughly from asilicon substrate 2 into which circuit devices or components areintegrated, a multilevel interconnection layer 3 for inter-connectingthe circuit devices in a predetermined relationship, and connect plugs(each with a metal plug 4 and an insulating film 5) formed in throughholes that are formed in the silicon substrate 2 and the firstinsulating film in the multilevel interconnection layer 3 and adapted toelectrically connect it with another chip.

The multilevel interconnection layer 3 comprises a first interlayerinsulating film that covers the circuit devices, a first interconnectionlayer that is connected with circuit devices through contact holes(first contact holes) formed in the first interlayer insulating film, asecond interlayer insulating film formed over the first interlayerinsulating film to cover the first interconnection layer, and a secondinterconnection layer connected with the first interconnection layerthrough via holes (second contact holes) formed in the second interlayerinsulating film. The multilevel interconnection layer may comprise threeor more layers.

The metal plug 4 is formed outside the device formed region. Theinsulating film 5 is formed between the metal plug 4 and the siliconsubstrate 2 and between the metal plug and the first interlayerinsulating film, that is, between the metal plug and the through hole.The insulating film 5 and the metal plug 4 form a connect plug.

The multilevel interconnection layer 3 of each chip is formed on topwith pads 6. The opposite side of the silicon substrate 2 of each chipfrom the pads 6 is covered with an insulating film 7 except the connectplug areas.

The metal plugs 4 of the chip 1 a electrically connect through solderbumps 8 with the pads 6 formed on the multilevel interconnection layer 3of the chip 1 b, thus allowing the chips 1 a and 1 b to be electricallyconnected to each other. Other bumps than solder bumps may be used.

Likewise, the metal plugs 4 of the chip 1 b electrically connect throughsolder bumps 8 with the pads 6 formed on the multilevel interconnectionlayer 3 of the chip 1 c, thus allowing the chips 1 b and 1 c to beelectrically connected with each other. In this manner, the chips 1 a, 1b and 1 c are electrically connected with one another.

Unlike the conventional multichip semiconductor device in which multiplechips are placed on the same plane, the multichip semiconductor deviceof this embodiment has no problem that the plane area of the deviceincreases because the chips 1 a, 1 b and 1 c are stacked.

Moreover, unlike the conventional multichip semiconductor device inwhich two chips are connected together with their major surfaces opposedto each other, the multichip semiconductor device of FIG. 4 has noproblem that the number of chips to be stacked is limited to two becausethe chips are connected together by means of the metal plugs 4 that passthrough the silicon substrate 2 and the first interlayer insulatingfilm.

Furthermore, unlike the conventional semiconductor device in which chipsare stacked with the aid of plates, the semiconductor device of FIG. 4has no problems of complexity of the structure and increased thicknessbecause no plate is used to stack the chips.

In addition, the metal plugs 4 has the effect of disposing of unwantedheat.

Further, according to the semiconductor device of FIG. 4, signal delaysdue to the RC resistance of interconnections between each chip can beprevented because the chips are electrically connected by means of themetal plugs formed in the through holes that pass through the siliconsubstrate 2 and a part of the first interlayer insulating film.

In addition, according to the semiconductor device of FIG. 4, crosstalk(noise) can be reduced because the chips are electrically connected bymeans of the metal plugs. Thus, the semiconductor device of FIG. 4 canbe advantageously applied to devices with high speed operation and lowpower dissipation requirements.

According to the present embodiment, therefore, a multichipsemiconductor device can be provided which is small in area, simple instructure, small in thickness, and exhibits good heat radiation.

Although the embodiment has been described as comprising three chips,four or more chips can be connected in the same way. Not every chiphaving the metal plugs 4 need be connected with its neighbor by means ofthe plugs. That is, one or more of the chips may be formed with metalplugs only for the purpose of heat radiation.

Second Embodiment

FIG. 5 is a sectional view of a multichip semiconductor device accordingto a second embodiment of the present invention. In this figure, likereference numerals are used to denote corresponding parts to those inFIG. 4 and their detailed descriptions are omitted.

This embodiment is designed such that only the center chip 1 b hasconnect plugs (metal plug 4 and insulating film 5).

Pads 6 formed in the multilevel interconnection layer 3 of the chip 1 aare electrically connected through solder bumps 8 with pads 6 formed inthe multilevel interconnection layer 3 of the chip 1 b, allowing thechips 1 a and 1 b to be electrically connected with each other.

Metal plugs 4 of the chip 1 b are electrically connected through solderbumps 8 with pads 6 formed in the multilevel interconnection layer 3 ofthe chip 1 c. In this manner, the chips 1 a, 1 b and 1 c areelectrically connected with one another.

The second embodiment provides the same advantages as the firstembodiment. However, the chips can be stacked in number up to threebecause only the center chip 1 b is formed with the connect plugs.Nevertheless, this embodiment is advantageous in cost because only onechip is required to have the connect plugs.

Third Embodiment

FIG. 6 is a sectional view of a multichip semiconductor device accordingto a third embodiment of the present invention. In this figure, likereference numerals are used to denote corresponding parts to those inFIG. 4 and their detailed descriptions are omitted.

In this embodiment, two chips 1 a and 1 b are connected together with aninterconnecting substrate 9 made of a ceramic interposed therebetween.

The pads 6 formed in the multilevel inter-connection layer 3 of the chip1 a are electrically connected through the solder bumps 8 with the pads6 formed on the interconnecting substrate 9. The pads 6 formed on therear side of the interconnecting substrate 9 each of which iselectrically connected with a respective one of the pads on the top sideof the substrate are electrically connected with the pads 6 formed inthe multilevel interconnection layer 3 of the chip 1 b. Thus, the chips1 a and 1 b are electrically connected with each other.

The third embodiment also provides the same advantages as the firstembodiment. The third embodiment permits the device to be tested byputting a probe to the pads 6 formed in the multilevel inter-connectionlayer 3 of the chip 1 b.

In contrast, with such a structure as shown in FIG. 5 in which a chipformed with metal plugs is interposed between other chips, such testingcannot be made.

Fourth Embodiment

FIGS. 7A through 7I are sectional views in the order of steps of amethod of forming a multichip semiconductor device according to a fourthembodiment of the present invention.

First, as shown in FIG. 7A, a silicon substrate 10 is prepared. Thesilicon substrate has circuit components already formed therein andhence its major surface is covered with a first interlayer insulatingfilm 11. The insulating film is made of a material which, like siliconnitride, has high etch selectivity to silicon dioxide (SiO₂).

Next, as shown in FIG. 78, a mask pattern 12 of silicon dioxide isformed over the first interlayer insulating film 11 to a thickness of 1μm. By using the mask pattern 12 as a mask, the first interlayerinsulating film 11 and the silicon substrate 10 are then etched by meansof RIE using an etching gas containing a fluorine (F)-based gas, therebyforming a hole 13 that passes through the first interlayer insulatingfilm 11 but not the silicon substrate 10.

After that, annealing is preferably performed so as to recover fromdefects in the silicon substrate 10 which have been produced in formingthe hole 13.

The depth of the hole in the silicon substrate 10 is 100 μm. The overalldepth of the hole is the sum of 100 μm and the thickness of the firstinterlayer insulating film 11. The hole 13 eventually becomes a throughhole.

The hole 13 can be formed by first etching the silicon substrate 10 bymeans of RIE to form a hole, and then forming the first interlayerinsulating film 11 and etching the first interlayer insulating film orthe insulating film and the silicon substrate 10 by means of RIE.

In this case, as a mask pattern used in etching the silicon substratefor the first time, a material, such as SiO₂, Al, or Al₂O₃, may be used.

The processing technique of forming the hole 13 (through hole), is notlimited to RIE. For example, photoetching, wet etching, ultrasonicmachining or, electric discharge machining can be used. In addition,these processing techniques may be suitably used in combination. Amethod in which wet etching is combined with RIE or photoetching will bedescribed later.

Next, as shown in FIG. 7C, an SiO₂ film of 100 nm in thickness and anSi₃N₄ film of 100 nm in thickness are sequentially deposited over theentire surface by means of LPCVD to form an insulating film (firstinsulating film) 14 of SiO₂/Si₃N₄. Instead of the multilayeredinsulating film 14, a single layer of insulating film may be used.

Next, as shown in FIG. 7D, a metal film 15 is formed over the entiresurface to such a thickness that the hole 13 is filled with the metalfilm serving as a metal plug.

Examples of materials of the metal film 15 include tungsten (W),molybdenum (Mo), nickel (Ni), titanium (Ti), and their metal silicides.Examples of methods of forming the metal film include CVD, sputtering,and plating.

Next, as shown in FIG. 7E, the metal film 15 and the insulating film 14are removed by means of CMP, etchback, or the like until the surface ofthe first interlayer insulating film 11 is exposed.

As a result, a structure is formed in which the metal film (metal plug)15 has been buried in the hole 13. Such a structure can be formed byanother method, which will be described later with reference to FIGS.16A through 16F.

Next, as shown in FIG. 7F, a multilevel interconnection structure 16 isformed over the silicon substrate 10 which forms a multilevelinterconnection layer with the first interlayer insulating film 11. Themultilevel interconnection structure 16 is formed of a metalinterconnect layer, an interlayer insulating film, a plug, etc. Afterthat, a groove is formed in the surface of the multilevelinterconnection layer 16 and a pad 17 is then formed in that groove.

FIG. 8 shows the structure of the multilevel interconnection layer inthe vicinity of the hole 13, and FIG. 9 shows the structure of themultilevel interconnection layer in the device region.

As shown in FIG. 9, MOS transistors are formed in the device region. InFIGS. 8 and 9, 11 a denotes a second interlayer insulating film, 11 b athird interlayer insulating film, 11 c a fourth interlayer insulatingfilm, 11 n an nth interlayer insulating film, 19 a and 20 a a firstmetal interconnection, 19 b and 20 b a second metal interconnection, and20 c a third metal interconnection.

Next, as shown in FIG. 7G, a portion of the silicon substrate 10 isstripped off (removed) from its rear side opposite to the surface inwhich the hole 13 is formed until the insulating film at the bottom ofthe hole 13 is exposed.

Making the silicon substrate 10 thinner can be accomplished by the useof CMP, chemical polishing, mechanical polishing, wet etching, plasmaetching, gas etching, or a combination thereof. Among these techniques,CMP is the most typical and preferably used.

The step in FIG. 7G is preferably performed under the conditions thathigh selectivity is attained between the silicon substrate 10 and theinsulating film 14. Under such conditions, the processing will beterminated automatically at the insulating film 14.

Next, as shown in FIG. 7H, the rear side of the silicon substrate 10 isselectively etched until a portion of the insulating film 14 which isformed on the sidewall of the hole 13 and located above the insulatingfilm at the bottom of the hole is exposed.

This process is performed by means of either wet etching or dry etchingsuch CDE or RIE. Instead of etching, CMP may be used.

After that, the damaged layer produced by the etching or CMP is removedby wet etching by way of example. This removing process is not requiredwhen no damage occurs. The reason it is removed is that the damagedlayer adversely affects the formation of an SiO₂ film 18 in thesubsequent step.

Next, the SiO₂ film 18 (second insulating film) is formed over theentire surface of the rear side of the silicon substrate 10 by means ofplasma CVD.

Where a low-temperature process is required, a coating of SOG or thelike is preferably used instead of the SiO₂ film 18. In order to reducethe stress to which the silicon substrate is subject, an organic film,such as a polyimide film, is preferably used instead of the SiO₂ film18.

Next, as shown in FIG. 7I, the SiO₂ film 18 and the interlayerinsulating film 14 are polished by means of CMP until the metal plug 15is exposed.

As a result, a structure is completed in which a connect plug consistingof the insulating film 14 and the metal plug 15 is buried in the throughhole (the hole 13) and the rear side of the silicon substrate 10 iscovered with the SiO₂ film 18.

As described above, according to the first embodiment of the presentinvention, by forming a hole 13 in the silicon substrate 10 and thenpolishing the rear side of the silicon substrate so as to allow the holeto pass through the substrate, a structure is formed in which a connectplug (insulating film 14 and metal plug 15) is buried in the throughhole (hole 13).

Accordingly, such a structure can be formed readily because there is noneed of forming a through hole even if the original silicon substrate isthick (normally it is thick).

Unlike a method which forms a through hole by etching a thick siliconsubstrate from its rear side as well, the method of this embodiment hasno requirement of photolithography that needs accurate registration offront and rear patterns with each other. Thus, the connect plug formingprocess becomes simpler and requires less steps.

Where there is no need of covering the rear side of the siliconsubstrate with the SiO₂ film 18, the step of FIG. 7G to polish thesilicon substrate 10 and the interlayer insulating film 14 is continueduntil the metal plug 15 is exposed. This also results in the structurein which the connect plug is buried in the through hole.

The polishing of the silicon substrate 10 is preferably performed afterit has been cut out from a wafer. This is because it is difficult topolish uniformly the wafer, which is generally large and exhibits lowmechanical strength.

The hole 13 and the metal plug 15 are formed prior to the formation ofmetal interconnections. Thus, the metal interconnections are notaffected by heat treatment for forming the metal plug. Further, themetal interconnections are not affected by annealing for recovery fromdefects which is performed after the formation of the hole 13.

This allows the metal plug 15 to be formed of conductive paste of lowresistance such as gold (its sintering temperature is about 600° C.)when aluminum (its melting point is 660° C.) is used for the metalinter-connections.

The metal plug is formed after the formation of circuit devices. Thus,degradation of device characteristics due to diffusion of the metalforming the metal plug can be prevented.

That is, when the circuit devices are formed after the metal plug hasbeen formed, the heat treatment necessary to form the circuit devicescauses the metal to diffuse into the device regions, thereby degradingthe device characteristics.

FIGS. 10A through 10D are sectional views of variously structuredconnect plugs. These sectional views correspond to the step of FIG. 7F.In these figures, 19 denotes a metal interconnection.

FIG. 10A shows a connect plug according to the present embodiment.

FIG. 10B shows a connect plug-which has a low stress film 18 formedtherein.

That is, with this connect plug, the metal plug 15 is formed so that anunfilled region is formed in the through hole. In the unfilled region isformed the low stress film 18 which is smaller than the metal plug 15 inthe difference in thermal expansion coefficient from the semiconductorsubstrate 10 a thereby filling up the through hole.

The low stress film 18 may be either an insulating film, a semiconductorfilm, or a metal film. To be specific, the film 18 may be a conductivepaste film, a FOX film, an SOG film, or an SiO₂ film formed by HDP (HighDensity Plasma)-CVD.

The use of such a connect plug can prevent degradation of devicecharacteristics due to defects in the silicon substrate 10 caused by alarge stress imposed on the connect plug formed region.

FIG. 10C shows a connect plug having a cap metal film 45.

That is, the metal plug 15 is not formed so as to fill up the throughhole. The metal film 15 is formed on the top surface of the metal plug15, thereby filling up the through hole.

FIG. 10D shows a connect plug which uses a cap insulating film 46instead of the cap metal film 45 of FIG. 10C.

By forming such a cap metal film 45 or a cap insulating film 46, thesurface of the metal plug 15 is made flat, allowing the fine metalinterconnect line 19 to be formed readily above the metal plug 15.

The use of the cap insulating film 46 that can be formed at lowtemperature can avoid such a disadvantage as the surface of the metalplug 15 is oxidized in post steps.

FIGS. 11A through 11D are sectional views in the order of steps offorming the hole 13 in accordance with another method. This methodcombines RIE or photoetching with wet etching.

First, as shown in FIG. 11A, a first interlayer insulating film 11 isformed over the major surface {100} of a silicon substrate 10. A maskpattern 12 is then formed on the first interlayer insulating film 11. Byusing the mask pattern 12 as a mask, the first interlayer insulatingfilm 11 and the silicon substrate 10 are selectively etched to form ahole 13 a rectangular in section.

As the etching technique, use is made of RIE or photoetching such asphotochemical etching or photoabrasion etching. In particular,photoetching is suitable for forming the deep hole 13 a because it hasadvantages of high speed and low damage. For photoetching, a Cl₂ gas isused as an etching gas and ultraviolet rays are used as excitationlight.

Next, as shown in FIG. 11B, the silicon substrate 10 is subjected to wetetching using the mask pattern 12 as a mask, thereby exposing the {111}plane. As a result, a hole 13 b triangular in section is formed. As anetchant, use is made of a KOH solution maintained at temperatures from60 to 90° C.

Next, as shown in FIG. 11B, a metal 21, such as nickel (Ni), titanium(Ti), zirconium (Zr), hafnium (Hf), or vanadium (V), is placed insidethe hole 13 b.

To be specific, the metal 21 is placed at the bottom of the hole 13 b.

Next, as shown in FIG. 11C, heat treatment is carried out to cause themetal 21 to react with the silicon substrate 10. As a result, a layer 22of metal silicide is formed in that portion of the silicon substrate 10which is located below the bottom of the hole 13 b.

Next, as shown in FIG. 11D, the metal silicide layer 22 is selectivelyetched away to form a hole 13 c deeper than the hole 13 b. Finally, aninsulating film is formed, a metal is buried in the hole 13 c, and thenthe rear side of the substrate is polished, whereby a deep through holeis formed.

By making a hole deeper in steps in this manner, deep hole and a throughhole can be formed readily.

FIGS. 12A, 12B and 12C show other methods of forming a metal plug.

FIG. 12A shows a method of forming a metal plug by first coating theentire surface with a conductive paste 23 and then fluidizing theconductive paste by means of heat treatment to thereby bury the paste inthe hole. The excessive conductive paste outside the hole can be removedby means of CMP by way of example.

FIG. 12B shows a method by which metal grains 24 are deposited onto theentire surface to fill the hole and then excessive grains outside thehole are removed by means of CMP.

In this method, a solvent (suspension) in which metal grains aredispersed may be used instead of the metal grains.

FIG. 12C shows a method of forming a metal silicide layer 26 by firstdepositing a silicon film 25 over the entire surface, next depositing alayer of refractory metal (not shown), such as titanium, on the siliconlayer 25, and then causing the refractory metal layer to react with thesilicon layer 25 by heat treatment. The excessive metal silicide layer26 outside the hole is etched away by means of CMP by way of example.

The silicon layer is deposited on the insulating film with conformality.The silicon layer and the metal film exhibit high adhesion. With themethod of FIG. 12C, therefore, since the entire surface of theinterlayer insulating film 14 inside the hole is covered with thesilicon layer 25 even if the hole is deep, the metal silicide layer 31is formed over the entire surface of the insulating film 14 inside thehole. If a cavity is left inside the hole, it is preferably filled witha low stress film.

FIGS. 13A, 13B and 13C show still another method of forming a metalplug.

First, as shown in FIG. 13A, a silicon film 27 is formed so as to coverthe sidewalls and bottom of the hole 13. After that, as shown in FIG.13A, Ni grains (metal balls) 28 of the order of 10μ in diameter areplaced in the hole.

Next, as shown in FIG. 13B, heat treatment is carried out to cause theNi grains to react with the silicon film 27, thereby forming a nickelsilicide layer 29 in the hole. Since the silicon film 27 and the Nigrains 28 in the hole are not sufficient in amount, a cavity is leftabove the nickel silicide layer 29.

Finally, as shown in FIG. 13C, an insulating layer or metal layer,serving as a cap layer 30, is formed over the entire surface and thenthe insulating layer or metal layer is polished to thereby fill thecavity with the cap layer 30.

The method of forming a metal plug is not limited to the methodsdescribed so far (the CVD method, the sputtering method, the platingmethod, the conductive paste-based method, the metal grain-based method,the metal ball-based method, and the suspension-based method). Forexample, these methods may be combined suitably.

FIGS. 14A to 14D show another method of forming a metal plug. Thismethod differs from the methods so far in that a metal plug 15 is formedafter a through hole has been formed by polishing the rear side of asilicon substrate 11.

First, as shown in FIG. 14A, a mask pattern 12 a of aluminum is formedover the surface of the silicon substrate 10 into which circuit deviceshave been manufactured and the first interlayer insulating film 11 andthe silicon substrate 10 are etched using the mask pattern 12 a as amask to thereby form a hole 13.

Next, as shown in FIG. 14B, an SOG film 31 is formed over the entiresurface and then a FOX film 32 is formed over the entire surface so asto fill up the hole 13.

Next, as shown in FIG. 14C, the SOG film 31 and the FOX film 32 outsidethe hole 13 are removed by means of CMP or etchback by way of example.

After that, the steps shown in FIGS. 7E through 7I are performed.

Next, as shown in FIG. 14D, the FOX film 32 inside the hole 13 isremoved using. CDE by way of example, and the metal plug 15 is buried inthe hole in the same manner as the steps of FIGS. 7D and 7E.

Where chips are connected together as shown in FIG. 15, a pad 33 and ametal ball 34 made of gold are formed after the metal plug 15 has beenformed.

FIGS. 16A through 16F show another method of forming a connect plug.This method differs from the methods described so far in that a metalplug 15 which has been formed in advance independently of a siliconsubstrate 10 is buried in a hole 13 formed in the silicon substrate.

In the first place, a method of forming the metal plug 15 will bedescribed.

First, as shown in FIG. 16A, a groove 36 is formed in a substrate ofsilicon dioxide (SiO₂).

Next, as shown in FIG. 16A, metal balls 37 are buried in the groove 36.

Finally, as shown in FIG. 16B, the metal balls 37 are fused by heattreatment, thereby forming the metal plug 15 in the groove 36.

A method of forming a connect plug using the metal plug 15 thus formedin advance will be described next.

First, as shown in FIG. 16C, the metal plug 15 is glued to an adhesivefilm 38.

Next, as shown in FIG. 16D, the metal plug 15 glued to the adhesive film38 is taken out of the groove 36.

Next, as shown in FIG. 16E, the metal plug 15 glued to the adhesive filmis inserted into the hole 13 of the silicon substrate 10 in the step ofFIG. 7C. The adhesive film is then stripped off the metal plug.

Next, as shown in FIG. 16F, the metal plug 15 is fused, so that it isfixed in the hole 13.

The method which employs the metal plug 15 formed in advance provideshigh throughput and allows the process temperature to be low as comparedwith a method by which a metal film, serving as the metal plug 4, isformed on the silicon substrate 10 using a film forming method such assputtering, CVD, or the like.

Although, in this example, silicon dioxide is chosen as the material ofthe substrate 35, any other material may be used provided that it doesnot react with the metal balls 37.

Instead of the metal balls 37, a low-resistivity conductive paste madeof gold, palladium, or the like may be used. In this case, the groove 36is first filled with the conductive paste using screen printing and thenthe conductive paste is sintered, thereby forming the metal plug 15.

Although the conductive paste made of gold or palladium has a highsintering temperature, it does not matter because the paste is sinteredon the substrate 35 that is different from the silicon substrate 10.Unlike ordinary one, the conductive paste need not contain resin orglass.

Instead of using the adhesive film 38 to take the metal plug 15 out ofthe groove 36, another means, such as tweezers, may be used.

By forming an adhesive layer in the hole 13 in advance, the metal plug15 may be fixed in the hole 13. To be specific, after the hole 13 iscoated with SOG or FOX to form an adhesive layer therein, the metal plug15 is buried in the hole 13. After that, the adhesive layer issolidified.

Fifth Embodiment

FIGS. 17A and 17B are sectional views illustrating a method of formingchips for a multichip semiconductor device according to a fifthembodiment of the present invention. In these figures, like referencenumerals are used to denote corresponding parts to those in FIGS. 7Athrough 7I and their detailed descriptions are omitted.

In this embodiment, following the step of FIG. 7I in the fourthembodiment, the metal plug 15 is etched from the rear side of thesilicon substrate 10 as shown in FIG. 17A, thereby forming an unfilledregion in the through hole.

Next, as shown in FIG. 17B, the metal plug 15 (the recess forming theunfilled region of the through hole) and a solder bump 8 are registeredwith each other, then connected together.

In this case, it is preferable that the registration of the metal plug15 and the solder bump 8 with each other be performed through imageprocessing. This is because the recess corresponding to the unfilledregion of the through hole and other portions appear on an image with agreat difference in light and shade and hence an accurate registrationcan be performed easily.

The recess allows the sidewall of the bump 8 and the sidewall of thethrough hole to be brought into contact with each other. Thus, the bumpcan be fixed more firmly than without the recess.

Conversely, the metal plug 15 may be formed to protrude from the throughhole. In such a case, the bump 8 will not be brought into contact withthe silicon substrate 10, preventing the silicon substrate from beingcontaminated by the solder bump.

Sixth Embodiment

FIG. 18 is a sectional view of a multichip semiconductor deviceaccording to a sixth embodiment of the present invention. In thisfigure, like reference numerals are used to denote corresponding partsto those in FIG. 4 and their detailed descriptions are omitted. In chips1 a and 1 b, the multilevel inter-connection layer 3, the insulatingfilms 5 and 7 and the pads 6 are omitted.

The feature of this embodiment is that a radiation fin 39 is placed onthe chip 1 a. The radiation fin is fixed to the chip 1 a by adhesive 40.Alternatively, the fin may be fixed to an insulating film bymetallization.

According to the sixth embodiment, the metal plug 4 and the radiationfin 39 can enhance the heat radiation capability of the device.

Seventh Embodiment

FIG. 19A is a sectional view of a multichip semiconductor deviceaccording to a seventh embodiment of the present invention, and FIG. 19Bis an enlarged view of a bump 8 in FIG. 19A. In these figures, likereference numerals are used to denote corresponding parts to those inFIG. 4. Reference numeral 7 a denotes an insulating film, and 42 asolder.

This embodiment features the provision of a heat radiation dummy bump 8d between chips 1 a and 1 b.

By the dummy bump 8 d, the chips 1 a and 1 b are mechanically connectedwith each other but not electrically connected together. The dummy bumpconnects the chips 1 a and 1 b with each other through a metal film notshown.

The dummy bump may be formed of a metal such as gold. Alternatively, asemiconductor or insulating material may be used provided that it isgood in heat conduction. Further, a filler can be used for the dummybump. If the dummy bump 8 d and the interconnect bump 8 are made of thesame material, they can be formed simultaneously, checking an increasein the number of manufacturing steps.

The dummy bump 8 d alone can improve the heat radiation capability. Inorder to further enhance the heat radiation capability, it is preferableto couple the dummy bump 8 d to a radiation fin.

Eighth Embodiment

FIG. 20 is a diagram for use in explanation of a method of manufacturinga multichip semiconductor device according to an eighth embodiment ofthe present invention.

Although, in the seventh embodiment described in connection with FIGS.17A and 17B, the solder bump 8 is formed on the metal plug 15, in thepresent embodiment a solder bump 8 is formed on a member 47 (forexample, a chip with metal plugs, a chip with no metal plug, or aninterconnection substrate) to which a connection is made. A metal plug 4formed to protrude from the rear side of a silicon substrate 2 isbrought into contact with the solder bump 8.

In this embodiment as well, the bump 8 is kept away from the siliconsubstrate 10, preventing the silicon substrate from being contaminatedby the bump.

Ninth Embodiment

FIG. 21 is a sectional view of a multichip semiconductor deviceaccording to a ninth embodiment of the present invention. In thisfigure, like reference numerals are used to denote corresponding partsto those in FIG. 4. In chips 1 a, 1 b, and 1 c, the multilevelinterconnection layer 3, the insulating films 5 and 7 and the pads 6 areomitted. The chip 1 c need not necessarily be provided with metal plugs.

The present embodiment uses a TAB tape as a packing member. In FIG. 21,43 denotes a plastic tape, and 44 a lead terminal. In FIG. 22 there isillustrated a conventional multichip semiconductor device using TABtape. As can be seen from comparison between FIGS. 21 and 22, thesemiconductor device of the present embodiment is smaller in plane areathan the conventional semiconductor device.

According to the present embodiment, chips can be stacked, which, inaddition to the advantage of small plane area, allows all the chips,some chips, or each chip to be tested through the use of metal plugs 4.

For testing of the entire semiconductor device, a probe is put to a pad(not shown) on the multilevel interconnection layer of the chip 1 a. Fortesting of the chips 1 a and 1 b, the probe is put to a pad on themultilevel interconnection layer of the chip 1 b after the chips 1 a and1 b have been connected together.

Tenth Embodiment

FIGS. 23A through 23F are sectional views in the order of steps of amethod of forming a multichip semiconductor device according to a tenthembodiment of the present invention.

After NAND type EEPROM memory cells and peripheral devices (not shown)have been manufactured into a silicon substrate 50 using well knowntechniques as shown in FIG. 23A, a first interlayer insulating film 56is formed.

In FIGS. 23A through 23F, 51 denotes a tunnel oxide layer, 52F afloating gate electrode, 53 an intergate insulating film, 52C a controlgate electrode, 54 a source diffused region, and 55 a drain diffusedregion. Although, in practice, a large number of memory cells areformed, only one memory cell is illustrated for the purpose ofsimplifying illustration.

Next, as shown in FIG. 23A, a contact hole is formed in the firstinterlayer insulating film 56 and then a Ti/TiN layer 57 and a W bitline plug 58 are sequentially formed in the contact hole.

More specifically, the contact hole is formed first, and a Ti film, aTiN film and a W film are then formed in sequence over the entiresurface. Note that the W film is formed by blanket CVD. Finally, the Wfilm, the Ti film and the TiN film outside the contact hole are removedby means of CMP.

Next, as shown in FIG. 23B, a mask pattern 59 of, for example, aluminumis formed on the first interlayer insulating film 56, and then theregions of the first insulating film 56 and the silicon substrate 50where connect plugs are to be formed are etched using the mask patternas a mask. Thus, a square hole 56 is formed which is 100 μm on a sideand has a depth of 150 to 200 μm. After this process, the mask pattern59 is removed.

Next, as shown in FIG. 23C, an SiO₂ film 61 is formed on the sidewall ofthe hole 60 and a polycrystalline silicon film 62 of 500 nm in thicknessis formed on the SiO₂ film. After that, a nickel film 63 as a metal plugis formed to fill up the hole 60.

More specifically, the SiO₂ film 61 of 500 nm in thickness, thepolycrystalline silicon film 62 of 500 nm in thickness and the nickelfilm 63 are formed in sequence over the entire surface and thensurpluses of the SiO₂ film, the silicon film 62 and the nickel filmoutside the hole are removed.

The nickel film 63 is formed by first burying nickel paste in the hole60 using screen printing by way of example and then sintering that pasteat a temperature of 600° C.

Next, as shown in FIG. 23D, a bit line 64 and a first interconnectionlayer 65 are formed by means of conventional techniques.

To be specific, a Ti film of 10 nm in thickness, a TiN film of 10 nm inthickness, an AlCu film of 400 nm in thickness and a TiN film of 40 nmin thickness are sequentially formed and then the resulting multilevelfilms are selectively etched by means of photo-lithographic and etchingtechniques, thereby forming the bit line 64 and the firstinterconnection line 65.

Next, as shown in FIG. 23D, a second interlayer insulating film 66 isformed and then a via hole is formed in the second insulating film.After that, a second interconnection film 68 is formed which connectswith the first interconnection layer 65 through a plug 67.

The second interconnection layer 68 can be formed in the same way as thefirst interconnection layer 65. The plug 67 is formed of a film of, forexample, tungsten. The second interconnection layer on the memory cellarea is omitted.

Next, as shown in FIG. 23D, as a passivation film that covers the secondinterconnection layer 58, a photosensitive polyimide film 69 of 450 nmin thickness is formed by means of plasma CVD and an opening (padopening) is then formed in that portion of the polyimide film which islocated above the second interconnection layer 68. After that, it ispreferable that each of chips formed on a wafer be electrically testedby putting a probe to the pad (not shown).

Next, as shown in FIG. 23E, the rear side of the silicon substrate 50 ismechanically polished to expose the nickel film 63.

This polishing process is preferably performed after the siliconsubstrate 50 has been cut out from the wafer. The reason is that thewafer is difficult to polish uniformly as described previously.Following the polishing process, damage resulting from polishing isremoved by wet etching.

In order to allow individual chips to be automatically separated whenthe wafer thickness is reduced by polishing, it is preferable to scorethe wafer in advance.

Next, as shown in FIG. 23F, an Au ball bump 70 is formed on the secondinterconnection layer 68 and then solder 71 is formed on the ball bumpusing transferring techniques. If, at this point, good chips have beenknown as a result of probe testing, then the Au ball bump 70 has only tobe formed on only the good chips. This will result in better yield andincreased production efficiency.

Finally, as shown in FIG. 24, the solder 71 (the Au ball bump 70) andthe nickel film (metal plug) 63 are registered with each other and thenbrought into contact with each other to connect the silicon substrates50 together, whereby an EEPROM multichip semiconductor device iscompleted. After that, its electrical characteristics are evaluated. Ifa defective chip is found, the solder 71 is heated to its melting pointand the defective chip is then separated from a stack of chips. Thedefective chip is then replaced with a good one.

Although the present embodiment has been described in terms of a NANDtype EEPROM multichip semiconductor device, a NOR type EEPROM multichipsemiconductor device and a DRAM multichip semiconductor device can alsobe manufactured in the same way as in the present embodiment.

In addition, multichip semiconductor devices for information processingunits, such as personal computers, can also be manufactured.

According to the present invention, as described above, a multichipsemiconductor device can be provided which is small in plane area,simple in structure, and small in thickness. This is because at leastone chip has a structure in which a connect plug of metal is formed in ahole that passes through its semiconductor substrate and interlayerinsulating film and the chip is electrically connected with another chipby the connect plug.

Moreover, the present invention uses, as a chip in a multichipsemiconductor device, a semiconductor substrate into which circuitcomponents are manufactured and a connect plug of metal, formed in athrough hole that passes through the semiconductor substrate and aninterlayer insulating film formed on the substrate, for providing anelectrical connection with another chip.

By the use of such a chip, a multichip semi-conductor device of thepresent invention is realized.

Furthermore, in the present invention, after the formation of a holewhich passes through the interlayer insulating film but not thesemiconductor substrate, the rear side of the substrate is processed toallow the hole to pass through the substrate. Thus, even if the originalsemiconductor substrate is thick, the through hole can be formed easily.

Accordingly, even if a semiconductor substrate is thick, a chip for amultichip semiconductor device of the present invention can be formedeasily.

Eleventh Embodiment

FIG. 25 is a cross-sectional view showing a multichip semiconductordevice according to an eleventh embodiment of the present invention.

The multichip semiconductor device is constructed such that two chips101 ₁ and 101 ₂ are connected via an interlayer wiring substrate 109formed of a ceramic material. The chip 101 ₁, 101 ₂ generally comprisesa silicon substrate 102 on which devices are integrally formed, and awiring multilayer 103 for connecting the devices in a predeterminedrelationship.

A pad 106 provided on the wiring multilayer 103 of chip 101 ₁ iselectrically connected to a pad 106 provided on the multilayer wiringsubstrate 109 through a solder bump 108. Another pad 106 electricallyconnected to this pad 106 and provided on the multilayer wiringsubstrate 109 is electrically connected to a pad 106 provided on thewiring multilayer 103 of chip 101 ₂. The upper and lower chip 101 ₁ and101 ₂ are electrically connected to each other through the multilayerwiring substrate 109 interposed therebetween.

A conductive through-plug 104 (conductive plug) penetrating the siliconsubstrate 102 is provided in the chip 101 ₂. The though-plug 104 iselectrically connected to the pad 106 of multilayer wiring substrate 109through the pad 106 of chip 101 ₂ and the bump 108 provided thereon.

The through-plug 104 is formed outside the device formation region. Aninsulating film 105 is provided between the through-plug 104 and siliconsubstrate 102 (through-hole). The insulating film 105 and through-plug104 constitute a connect plug.

An insulating film 107 is coated on a silicon region, that is, a regionexcept the through-plug 104, of the silicon substrate 102 of chip 101 ₂,which is opposed to the wiring multilayer 103. The through-plug 104 hasa heat-radiation facilitating effect.

Another means for facilitating heat radiation is to form the multilayerwiring substrate 109 of a material having a higher thermal conductivitythan the chip 101 ₁, 101 ₂. Specifically, in the case of a Si chip, suchan insulating material as SiC may be used. Alternatively, a metal platemay be buried, as will be described below in connection with a twelfthembodiment of the invention.

According to the present embodiment, since the chip 101 ₂ is stacked onthe chip 101 ₁ with the multilayer wiring substrate 109 interposed, thearea in plan of the device can be reduced, unlike the conventionalmultichip semiconductor device in which a plurality of chips arearranged in a plane.

According to the present embodiment, since the chip 101 ₂ having thethrough-plug 104 electrically connected to the chip 101 ₁ via themultilayer wiring substrate 109 is used, an inspection of the device canbe performed by putting a test probe in contact with the through-plug104. Since the through-plug 104 is exposed to the bottom face of thesemiconductor substrate 102, the test probe can easily be put in contactwith the through-plug 104. According to the present embodiment,therefore, the device can easily be inspected.

In this embodiment, the number of chips is set at one. However, sincechips are interconnected via the multilayer wiring substrate 109 in thisembodiment, the number of chips is not limited to two, unlike theconventional multichip semiconductor device wherein chips are connectedin a face-to-face fashion.

Therefore, the present embodiment can provide a multichip semiconductordevice with a small area in plan, which permits an easy inspection anddoes not limit the number of stacked chips to two.

The through-plug 104, though provided in the chip 101 ₂ in the presentembodiment, may be provided in the chip 101 ₁ or in each of the chips101 ₁ and 101 ₂.

12th Embodiment

FIG. 26 is a cross-sectional view showing a multichip semiconductordevice according to a 12th embodiment of the present invention. FIG. 27is a plan view of a connecting substrate of the multichip semiconductordevice of FIG. 26.

This multichip semiconductor device is characterized in that twoadjacent chips, i.e. upper and lower chips, are electrically connectedvia a connecting substrate having a through-plug and a heater.

Specifically, a pad 106 provided on a wiring multilayer 103 of a chip101 ₁ is connected to a through-plug 104 of a connecting substrate 131 ₁via a solder bump 108. The through-plug 104 of connecting substrate 131₁ is connected to a through-plug 104 of a chip 101 ₂ via another solderbump 108.

The adjacent upper and lower chips 101 ₁ and 101 ₂ are electricallyconnected via the through-plug 104 of the interposed connectingsubstrate 131 ₁. Similarly, the chip 101 ₂ is electrically connected toa chip 101 ₃ via a through-plug 104 of a connecting substrate 131 ₂. Thethrough-plugs 104 are formed according to the methods of the twelfthembodiment.

The connecting substrates 131 ₁ and 131 ₂ are formed to have a thermalconductivity sufficiently higher than that of the chips 101 ₁ to 101 ₃.

Specifically, the connecting substrates 131 ₁ and 131 ₂ are formed of amaterial having a higher thermal conductivity than silicon, of which thesilicon substrate 102 is formed, for example, an insulating materialsuch as SiC. In the example shown, the connecting substrate 131 ₂ isformed of an insulating material. Accordingly, no insulating film isformed on a side wall of the through-hole in which the through-plug 104is buried.

A metal plate 132 having a higher thermal conductivity than theconnecting substrate body (through-plug 104+connecting substrate 131 ₁;through-plug 104+connecting substrate 131 ₂) is buried in the connectingsubstrate body. The metal plate 132 is formed of, e.g. W, or Cu. Themetal plate 132 may be provided on the surface of the connectingsubstrate 131 ₁, 131 ₂, or both in the connecting substrate 131 ₁, 131 ₂and on the surface of the connecting substrate 131 ₁, 131 ₂.

Heaters 133 are buried in upper and lower surface portions of theconnecting substrate 131 ₁, 131 ₂ so as to surround the vicinities ofthe solder bumps 8. The heaters 133 are connected to an external powersupply over power lines 134 of W, etc. provided on the connectingsubstrate 131 ₁, 131 ₂.

The power lines 134 can be controlled independently. Accordingly thefour heaters 133, i.e. two heaters 133 buried in the upper and lowersurfaces of the connecting substrate 131 ₁ and two heaters 133 buried inthe upper and lower surfaces of the connecting substrate 131 ₂, can becontrolled independently. Each power line 134 constitutes a capacitorfor ensuring stable supply of power.

In FIG. 26, reference numeral 35 denotes a wiring substrate, and 36 awiring multilayer. A connecting substrate 131 ₃ is similar to theconnecting substrate 131 ₁, 131 ₂, but it is not used forinterconnecting chips. The connecting substrate 131 ₃ is used as a heatradiating plate, but it may not necessarily be provided.

In addition, an insulating film, on the side wall of the through-hole inthe semiconductor substrate is omitted.

In the present embodiment, the connecting substrate 131 ₁, 131 ₂ has asufficiently higher thermal conductivity than the chip, 101 ₁ to 101 ₃.Even if the chips 101 ₁ to 101 ₃ produce heat in operation, the heat canbe efficiently radiated to the outside through the connecting substrates131 ₁ to 131 ₃. Thereby, deterioration in operational characteristics ofthe chips 101 ₁ to 101 ₃ and a decrease in life of the chips 101 ₁ to101 ₃ due to the produced heat can be prevented.

According to the present embodiment, the independently operable heaters133 provided on the connecting substrates 131 ₁ and 131 ₂ are operatedto selectively melt only the bumps connected to a chip determined to bedefective by inspection. Thus the defective chip alone can beselectively separated from the connecting substrate. Therefore, repairsto the chip can easily be made.

FIGS. 28A and 28B show how to make repairs. In these figures, onlyreference numerals necessary for descriptions are added. The structureof the multichip semiconductor device is the same as that shown in FIG.26 (the same applicable to the other embodiments).

FIG. 28A shows a state in which the chip is inspected by test probes.FIG. 28B shows a state in which the chip 101 ₂, which has beendetermined to be defective by the inspection, and the connectingsubstrate 131 ₂ connected thereto, are moved. In the step in FIG. 28B,the chip 101 ₂ and the connecting substrate 131 ₁ connected thereto maybe removed.

Subsequently, the chip 101 ₂ is separated from the connecting substrate131 ₂, and a new chip is connected to the connecting substrate 131 ₂.Then the connecting substrate 131 ₂ with the new chip is restored andconnected as in the previous state. If the new chip is inspected and ithas passed the inspection, repairs are completed. If the chip fails topass the inspection, the present step is repeated until it passes theinspection.

In the present embodiment, the heaters 133 are formed to surround thevicinities of the solder bumps 8, and the vicinities of solder bumps 108are preferentially heated. However, even if the heaters 133 are providedto heat the entire connecting substrate, repairs can be made more easilythan in the prior art.

13th Embodiment

FIG. 29 is a cross-sectional view showing a multichip semiconductordevice according to a 13th embodiment of the present invention.

The 13th embodiment differs from the 12th embodiment in that theconnecting substrates 131 ₁ to 131 ₃ are provided with a heat radiationfin 137. The radiation fin 137 is fixed to the connecting substrates 131₁ to 131 ₃ by means of, e.g. an adhesive. It may be fixed by other meanssuch as metallization.

According to this embodiment, heat is radiated not only through theconnecting substrates 131 ₁ to 131 ₃ but also through the radiation fin137 with a higher thermal conductivity. Therefore, heat can beefficiently radiated from the chips 101 ₁ to 101 ₃.

14th Embodiment

FIG. 30 is a cross-sectional view showing a multichip semiconductordevice according to a 14th embodiment of the invention.

The 14th embodiment differs from the 13th embodiment in that a radiationfin 137 is provided only on the chip which produces a great amount ofheat. In this embodiment, it is assumed that the amount of heat producedby the chip 101 ₂, 101 ₃ is greater than that produced by the chip 101₁. In this case, there is no need to provide the chip 101 ₃ with theconnecting substrate 131 ₃ serving as a radiation plate and thedimension of the device in the direction of stacking of chips can bereduced.

15th Embodiment

FIG. 31 is a cross-sectional view showing a multichip semiconductordevice according to a 15th embodiment of the invention.

The 15th embodiment differs from the 12th embodiment in that a wiringmultilayer is provided within the connecting substrate 131 ₂ and wiringis rearranged. Specifically, the solder bump 108 a is not connected tothe solder bump 108 b provided over the solder bump 108 a, but to thesolder bump 108 c, which is provided in an inclined upward direction ofthe solder bump 108 a, via a plug 138 a, a wiring layer 139 a and a plug138 b. On the other hand, the solder bump 108 d is not connected to thesolder bump 108 c but to a wiring layer 139 b via a plug 138 c.

The heaters 133 are buried in the upper and lower surface portions ofthe connecting substrate 131 ₂ at a distance from the wiring layers 139a and 139 b. However, the heaters 133 may be provided within theconnecting substrate 131 ₂ in the same layer as the wiring layers 139 aand 139 b.

16th Embodiment

FIG. 32 is a cross-sectional view showing a multichip semiconductordevice according to a 16th embodiment of the invention.

This embodiment differs from the 12th embodiment in that capacitors areprovided within the connecting substrate to stabilize power supply tothe chips. Referring to the connecting substrate 131 ₃, a power line 140and a ground line 141 are formed within the connecting substrate 131 ₃such that the ground line 141 extends above and below the power line140. Thereby, two series-connected capacitors are vertically provided.

The material of the connecting substrate 131 ₃ is an insulatingmaterial. Reference numerals 142 and 143 denote wiring elements.Although the wiring elements 142 and 143 are connected to the bumps viapads, such pads are not shown. Similar capacitors are formed inconnecting substrates (not shown) other than the connecting substrate131 ₃. Note that capacitors or an active element for stabilization ofthe power source and for amplifying a signal may be formed on theconnecting substrate instead of that the capacitors are formed withinthe connecting substrate.

17th Embodiment

FIG. 33 is a cross-sectional view showing a multichip semiconductordevice according to an 17th embodiment of the invention.

In the multichip semiconductor device of this embodiment, an upper-layerSi chip 151 ₁ is connected to lower-layer Si chips 151 ₂ and 151 ₃ viamultilayer wiring substrates 152 ₁ and 152 ₂ formed of Si. Referencenumeral 50 denotes device formation surfaces of the Si chips 151 ₁ to151 ₃.

Pads 153 provided on the Si chip 151 ₁ are connected via solder bumps154 to pads 155 provided on the multilayer wiring substrate 152 ₁. Thepads 155 are connected to pads 158 provided on the multilayer wiringsubstrate 152 ₂, via a wiring layer (not shown) formed on the multilayerwiring substrate 152 ₁, through-plugs 104 connected to the wiring layer,pads 156 provided on the multilayer wiring substrate 152 ₁ and bumpssolder 157. The through-plugs 104 and the wiring layer are normallyformed of a metal such as Cu or Al in order to fully exhibit theirfunctional properties. However, if it is important to equalize thermalexpansivities, they may be formed of Si films with high impurityconcentration.

The Pads 158 are connected to pads 161 provided on the Si chips 151 ₂and 151 ₃, via a wiring layer (not shown) formed on the multilayerwiring substrate 152 ₂, pads 159 connected to the wiring layer, andsolder bumps 160. This wiring layer is formed of a metallic material oran Si film with high impurity concentration, as mentioned above.

In this manner, the upper-layer Si chip 151 ₁ is connected to thelower-layer Si chips 151 ₂ and 151 ₃ via the multilayer wiringsubstrates 152 ₁ and 152 ₂.

The multilayer wiring substrate 152 ₁ is connected to the multilayerwiring substrate 152 ₂ via the pads 156, solder bumps 157 and pads 158.Similarly, the multilayer wiring substrate 152 ₂ is connected to aplastic substrate 165 via pads 162, solder bumps 163 and pads 164. Theplastic substrate 165 is provided with pads 166 and solder bumps 167.Wiring layers 168 for connecting the pads 164 and 166 are formed withinthe plastic substrate 165.

An adhesive 169 including no filler is filled between the Si chip 151 ₁and wiring substrate 152 ₁ and between the Si chips 151 ₂ and 151 ₃ andmultilayer wiring substrate 152 ₂.

Even if the adhesive 169 includes no filler, the Si chips 151 ₁ to 151 ₃and the multilayer wiring substrates 152 ₁ and 152 ₂ are formed of thesame Si. Accordingly, the thermal expansivity of the Si chips 151 ₁ to151 ₃ is equal to that of the multilayer wiring substrates 152 ₁ and 152₂. Therefore, highly reliable connection is achieved.

On the other hand, since the multilayer wiring substrate 152 ₂ andplastic substrate 165 are formed of different materials, an adhesive 170including a filler is filled between the wiring substrate 152 ₂ andplastic substrate 165, thereby ensuring reliable connectiontherebetween.

Since no devices are formed on the multilayer wiring substrates 152 ₁and 152 ₂, the pitch of solder bumps 163 can be set at a desired value.The pitch of solder bumps 163 may be set at such a value that theadhesive 170 can be surely put among the solder bumps 163.

As has been described above, in the present embodiment, since themultilayer wiring substrates 152 ₁ and 152 ₂ and Si chips 151 ₁ to 151 ₃are formed of the same Si, thermal strain hardly occurs in the solderbumps 154 and 160.

Accordingly, even if the integration density of the Si chips 151 ₁ to151 ₃ further increases and the distance between the Si chip 151 ₁ andmultilayer wiring substrate 152 ₁, as well as between the Si chips 151 ₂and 151 ₃ and multilayer wiring substrate 152 ₂, further decreases, thereliable connection therebetween is ensured. Accordingly, reliableconnection between the upper-layer Si chip 151 ₁ and the lower-layer Sichips 151 ₂ and 151 ₃ is ensured.

Since the multilayer wiring substrates 152 ₁ and 152 ₂ and Si chips 151₁ to 151 ₃ are formed of the same Si, there is no need to make theirthermal strains close to each other, and the adhesive 169 including nofiller can be used.

Accordingly, even if the integration density of the Si chips 151 ₁ to151 ₃ further increases and the distance between the Si chip 151 ₁ andmultilayer wiring substrate 152 ₁, as well as between the Si chips 151 ₂and 151 ₃ and multilayer wiring substrate 152 ₂, further decreases,there occurs no region which is not filled with the adhesive 169.Therefore, reliable connection between the upper-layer Si chip 151 ₁ andthe lower-layer Si chips 151 ₂ and 151 ₃ is ensured.

The area in plan of the device can be reduced for the same reason asdescribed with respect to the eleventh embodiment.

In the present embodiment, since there is no need to form through-plugsin the Si chips 151 ₁ to 151 ₃ on which devices are formed, a rise inmanufacturing cost can be suppressed. Needless to say, it is possible toconnect the Si chip 151 ₁ to the Si chips 151 ₂ and 151 ₃ via themultichip wiring substrate 152 ₁ by using the Si chips Si chips 151 ₁ to151 ₃ having through-plugs.

FIGS. 40A to 40H are cross-sectional views illustrating the steps of amethod of manufacturing the multichip semiconductor device according tothe present embodiment.

To start with, as shown in FIG. 34A devices (not shown) are integrallyformed on the device formation surface 150 of the Si substrate. The pads153 are then formed to constitute the Si chip 151 ₁. The solder bumps154 are then formed on the pads 153.

As is shown in FIG. 34B, the through-plugs 104 of Si, wiring layer andpads 155 are formed on the Si substrate, thus constituting themultilayer wiring substrate 152 ₁. The pads 155 are formed at positionscorresponding to the pads 153. Each of pads 153 and 155 has a squareshape with each of 20 μm. The pitch of the pads 153 and 155 is set at 30μm (the distance between adjacent pads is 10 μm).

In a step shown in FIG. 34C, the solder bumps 154 of Si chip 151 ₁ arealigned with the pads 155 of multilayer wiring substrate 152 ₁, andthese are bonded to each other. The epoxy adhesive 169 including nofiller is filled between the Si chip 151 ₁ and multilayer wiringsubstrate 152 ₁. Thus, a unit 171 ₁ wherein the Si chip 151 ₁ is bondedby flip-chip bonding to the multilayer wiring substrate 152 ₁ is formed.

The distance between the Si substrate constituting the multilayer wiringsubstrate 152 ₁ and the Si substrate constituting the Si chip 151 ₁ isset at 20 μm. Accordingly, the size of each solder bump 154 is set atabout 20 μmφ.

As is shown in FIG. 34D, devices (not shown) are integrally formed onthe device formation surface 150 of the Si substrate. The pads 161 arethen formed to constitute the Si chip 151 ₂. The solder bumps 160 arethen formed on the pads 161 of Si chip 151 ₂. Similarly, the Si chip 151₃ is formed and the solder bumps 160 are formed on the pads 161 of Sichip 151 ₃.

As is shown in FIG. 34E, the through-plugs 104 of Si, wiring layer andpads 158, 159 and 162 are formed on the Si substrate, thus constitutingthe multilayer wiring substrate 152 ₂. The solder bumps 157 are formedon the pads 158.

As is shown in FIG. 34F, like the unit 171 ₁, alignment, bonding andfilling of adhesive 169 are carried out, and a unit 171 ₂ wherein the Sichip 151 ₂ and Si chip 151 ₃ are bonded by flip-chip bonding to themultilayer wiring substrate 152 ₂ is formed.

Subsequently, as shown in FIG. 34G, the solder bumps 157 and pads 156are bonded and thus the units 171 ₁ and 171 ₂ are connected.

Since the multilayer wiring substrates 152 ₁ and 152 ₂ and Si chips 151₂ and 151 ₃ are formed of Si, no thermal strain occurs due to adifference in thermal expansivity. Accordingly, the size and pitch ofbumps may be determined by considering only the thickness of the Si chip151 ₂, 151 ₃ between the multilayer wiring substrates 152 ₁ and 152 ₂,without considering thermal strain due to a difference in thermalexpansivity.

Since the pads 162 formed on the lower surface of the multilayer wiringsubstrate 152 ₂ are to be connected to the solder bumps 163 of plasticsubstrate, 165, it is necessary that the diameter of each pad 162 andthe pitch of pads 162 be set at about 100 μm or more and at about 200 μmor more, respectively. A wiring layer for relaxing the pitch is formedon the multilayer wiring substrate 152 ₂.

At last, as shown in FIG. 34H, the plastic substrate 165 having pads 164and 166 and wiring layer 168 is formed. The solder bumps 163 and 167 areformed on the pads 64 and 66, respectively. The unit 171 ₂, to which theunit 171 ₁ is connected; is aligned with, and connected to, the plasticsubstrate 165. In order to relax strain, the adhesive 170 includingfiller of SiO₂ is filled between the plastic substrate 165 and unit 171₂. Thus, the multichip semiconductor device shown in FIG. 33 isobtained.

In the present embodiment, Si substrates are used for the multilayerwiring substrates 152 ₁ and 152 ₂. Accordingly, inexpensive, uniformmultilayer substrates 152 ₁ and 152 ₂ can be formed by mass production.

The design rules for the wiring layers, which constitute the multilayerwiring substrates 152 ₁ and 152 ₂, are much more relaxed than those forthe wiring layers which constitute the Si chips 151 ₁ and 151 ₂ (e.g. onthe order of several μm). Accordingly, a yield of nearly 100% can beachieved. Moreover, since there is no need to form devices such as MOStransistors or capacitors, there is no need to consider contamination onSi substrates, and the manufacturing process can be simplified.

In the present embodiment, it is assumed that the material of the chipsis the same as that of the multilayer wiring substrates. However, thesematerials may differ if their thermal expansivities are nearly equal. Inthis case, it is preferable to use such a combination of materials thatthe radiation properties of the multilayer wiring substrate (connectingsubstrate) become higher than those of the chip.

Besides, where the same material is used, it is preferable to form thethrough-plugs of a material having higher radiation properties than thematerial of, e.g. the multilayer wiring substrate, by providing themultilayer wiring substrate with radiation means such as a radiation finor by providing the through-plugs in the multilayer wiring substratewith radiation functions. Specifically, it is understood from a table ofFIG. 35 that SiC or AlN can be used if the material of the chips andmultilayer wiring substrates is Si.

As has been described above in detail, according to the presentinvention, since a plurality of chips are stacked, the area in plan ofthe device can be reduced. Moreover, the chip in which conductive plugsis formed may be situated at the top or bottom of the device and thusthe test probes can easily be put in contact with the conductive plugs.Therefore, inspections of the device can easily be performed.

According to the present invention, since a plurality of chips arestacked, the area in plan of the device can be reduced. In addition,since the heat radiation properties of the connecting substrate arehigher than those of the chips, the radiation properties of the devicecan be improved.

According to the present invention, since a plurality of chips arestacked, the area in plan of the device can be reduced. In addition,since bumps connected to a defective chip can be melted by heater unitsof the connecting substrate, repairs of the chip can easily be made.

According to the invention, since a plurality of chips are stacked, thearea in plan of the device can be reduced. In addition, since thethermal expansivity of the material of the connecting substrate isnearly equal to that of the material of the semiconductor substrate,reliable connection between the chips is ensured even if the bumps andadhesive are used for connection members.

Additional advantages and modifications will readily occur to thoseskilled in the art. Therefore, the invention in its broader aspects isnot limited to the specific details and representative embodiments shownand described herein. Accordingly, various modifications may be madewithout departing from the spirit or scope of the general inventiveconcept as defined by the appended claims and their equivalents.

1-2. (canceled)
 3. A multichip semiconductor device having a stack ofchips each having a semiconductor substrate which has a surface on whichcircuit components are formed and an interlayer insulating film formedon the surface of the semiconductor substrate, wherein at least one chipof the chips has a connect plug formed in a through hole which passesthrough the semiconductor substrate and the interlayer insulating film,and the connect plug of the at least one chip is electrically connectedto another chip of the chips through a bump with a predetermined space,wherein the another chip has a connect member that electrically connectswith the connect plug, and wherein the one chip and the another chip ofthe chips are electrically connected to each other through a packingmember interposed between the one chip and another chip. 4-61.(canceled)
 62. The multichip semiconductor device according to claim 3,further comprising a dummy bump for connecting the at least one chipwith the another chip.
 63. The multichip semiconductor device accordingto claim 3, wherein the connect plug has a plurality of metal grains.64. The device according to claim 3, wherein the bump is made of Au. 65.The device according to claim 3, wherein the connect plug is formed soas to remain an unfilled region of the through hole.
 66. The deviceaccording to claim 3, wherein the connect plug is formed to protrudefrom the through hole.
 67. A chip for use in a multichip semiconductordevice comprising: a semiconductor substrate having a surface on whichcircuit components are formed; a interlayer insulating film formed onthe surface of the semiconductor substrate; a connect plug made of ametal formed in a through hole that passes through a part of theinterlayer insulating film and the semiconductor substrate; and a bumpfor electrically connecting the connect plug to another chip with apredetermined space, wherein the connect plug comprises: a metal plugformed in the through hole and having a cavity, an insulating filmformed between the metal plug and a sidewall of the through hole, and alow stress film formed in the cavity of the metal plug, the low stressfilm being smaller than the metal plug in the difference in thermalexpansion coefficient from the semiconductor substrate.
 68. A chip foruse in a multichip semiconductor device comprising: a semiconductorsubstrate having a surface on which circuit components are formed; ainterlayer insulating film formed on the surface of the semiconductorsubstrate; a connect plug made of a metal formed in a through hole thatpasses through a part of the interlayer insulating film and thesemiconductor substrate; and a bump for electrically connecting theconnect plug to another chip with a predetermined space, wherein theconnect plug comprises: a metal plug formed in the through hole so thata space is left in the through hole on the top side of the semiconductorsubstrate, an insulating film formed between the metal plug and thesidewall of the through hole, and a cap layer formed in the space in thethrough hole.
 69. A chip for use in a multichip semiconductor devicecomprising: a semiconductor substrate having a surface on which circuitcomponents are formed; a interlayer insulating film formed on thesurface of the semiconductor substrate; a connect plug made of a metalformed in a through hole that passes through a part of the interlayerinsulating film and the semiconductor substrate; and a bump forelectrically connecting the connect plug to another chip with apredetermined space, wherein the connect plug comprises: a metal plugformed in the through hole so that a space is left in the through holeon a rear side of the semiconductor substrate, an insulating film formedbetween the metal plug and a sidewall of the through hole, and a capinsulating film formed in the space in the through hole.
 70. The chipaccording to any of claims 67-69, further comprising a dummy bump forconnecting the chip having the connect plug with the another chip. 71.The chip according to any of claims 67-69, wherein the connect plug hasa plurality of metal grains.
 72. The chip according to any of claims67-69, wherein the bump is made of Au.
 73. The chip according to any ofclaims 67-69, wherein the connect plug is formed so that the connectplug remains an unfilled region of the through hole.
 74. The chipaccording to any of claims 67-69, wherein the connect plug is formed toprotrude from the through hole.
 75. A semiconductor chip for use in amultichip semiconductor device comprising: a semiconductor substrateformed on a circuit components; a first interlayer insulating filmformed on the semiconductor substrate; a second insulating film formedon a sidewall of a through hole that passes through the first insulatingfilm and the semiconductor substrate; a metal plug that fills up thethrough hole; a second interlayer insulating film formed on the firstinterlayer insulating film; an interconnection layer formed on the metalplug; a plug formed on the interconnection layer; and a bump forelectrically connecting the plug to another chip with a predeterminedspace.
 76. The semiconductor chip according to claim 75, furthercomprising a dummy bump for connecting the chip having the metal plug tothe another chip.
 77. The semiconductor chip according to claim 75,wherein the metal plug has a plurality of metal grains.
 78. The chipaccording to claim 75, wherein the bump is made of Au.
 79. The chipaccording to claim 75, wherein the connect plug is formed so that theconnect plug remains an unfilled region of the through hole.
 80. Thechip according to claim 75, wherein the connect plug is formed toprotrude from the through hole.
 81. A method of forming a chip for usein a multichip semiconductor device comprising the steps of:manufacturing circuit components on a surface of a semiconductorsubstrate using integrated-circuit techniques; forming a interlayerinsulating film on the surface of the semiconductor substrate;selectively etching the interlayer insulating film and the semiconductorsubstrate to form a hole that passes through the interlayer insulatingfilm but not the semiconductor substrate; forming a first insulatingfilm on a sidewall and bottom of the hole to a thickness that does notfill up the hole; filling the hole with a second insulating film whichhas a higher etch rate than the first insulating film; forming a contacthole in the interlayer insulating film and forming an interconnectionlayer that connects with the circuit components through the contacthole; processing a rear side of the semiconductor substrate and thefirst insulating film in the hole to expose the second insulating filmat the bottom of the hole; etching away the second insulating film inthe hole; filling the hole covered with the first insulating film with ametal to form a metal plug; processing a rear side of the semiconductorsubstrate to thereby expose the metal plug at the bottom of the holeafter the filling the hole covered with the first insulating film withthe metal; and stacking the semiconductor substrate on anothersemiconductor substrate such that the exposed metal plug at the bottomof the hole of the semiconductor substrate connects with the exposedmetal plug at the bottom of the hole of the another semiconductorsubstrate.
 82. The method according to claim 81, further comprising:evaluating electrical characteristics of the multichip semiconductordevice after stacking the another semiconductor substrate, therebyfinding a defective substrate of the multichip semiconductor device; andreplacing the defective substrate found with a non-defective substrate.83. A method of forming a multichip semiconductor device comprising:forming circuit components on a surface of semiconductor substrate;forming an interlayer insulating film over the surface of thesemiconductor substrate; selectively etching the interlayer insulatingfilm and the semiconductor substrate to form a hole that passes throughthe interlayer insulating film but not the semiconductor substrate;forming an insulating film on the sidewall and bottom of the hole to athickness that does not fill up the hole; filling the hole covered withthe insulating film with a plurality of metal grains; and siliciding theplurality of the metal grains with the insulating film to form a metalplug.
 84. A multichip semiconductor device comprising: chips each havinga semiconductor substrate on which devices are integrally formed; and aconnecting substrate provided between adjacent two of said chips whichare vertically arranged, wherein the vertically adjacent two chips areelectrically connected via the connecting substrate, a through-hole isformed in at least one of the semiconductor substrates, and a conductiveplug is formed in the through-hole and connected to the connectingsubstrate.
 85. The multichip semiconductor device according to claim 84,wherein a material of the connecting substrate has higher radiationproperties than a material of each chip.
 86. The multichip semiconductordevice according to claim 84, wherein said connecting substratecomprises: a connecting substrate body having the conductive plug formedin the through-hole passing through the connecting substrate; and ahigh-thermal-conductivity member having a higher thermal conductivitythan the connecting substrate body.
 87. The multichip semiconductordevice according to claim 86, wherein said high-thermal-conductivitymember is a conductive plate formed within the connecting substratebody.
 88. The multichip semiconductor device according to claim 86,wherein said high-thermal-conductivity member is a radiation finprovided on a surface of the connecting substrate body.
 89. Themultichip semiconductor device according to claim 84, wherein saidconnecting substrate is formed of an insulating material, and acapacitor is formed within the connecting substrate, the capacitorhaving a first capacitor electrode formed of a power line, a secondcapacitor electrode formed of a ground line, and a capacitor insulatingfilm formed of the connecting substrate.
 90. A multichip semiconductordevice comprising: chips each having a semiconductor substrate on whichdevices are integrally formed; and a connecting substrate providedbetween adjacent two of said chips which are vertically arranged,wherein a through-hole is formed in the connecting substrate, and aconductive plug is formed in the through-hole, the vertically adjacenttwo chips are electrically connected via the connecting substrate, andthe connecting substrate has higher radiation properties than thevertically adjacent two chips.
 91. The multichip semiconductor deviceaccording to claim 90, wherein a material of the connecting substratehas higher radiation properties than a material of each chip.
 92. Themultichip semiconductor device according to claim 90, wherein saidconnecting substrate comprises: a connecting substrate body having theconductive plug formed in the through-hole passing through theconnecting substrate; and a high-thermal-conductivity member having ahigher thermal conductivity than the connecting substrate body.
 93. Themultichip semiconductor device according to claim 92, wherein saidhigh-thermal-conductivity member is a conductive plate formed within theconnecting substrate body.
 94. The multichip semiconductor deviceaccording to claim 92, wherein said high-thermal-conductivity member isa radiation fin provided on a surface of the connecting substrate body.95. The multichip semiconductor device according to claim 90, whereinsaid connecting substrate is formed of an insulating material, and acapacitor is formed within the connecting substrate, the capacitorhaving a first capacitor electrode formed of a power line, a secondcapacitor electrode formed of a ground line, and a capacitor insulatingfilm formed of the connecting substrate.
 96. A multichip semiconductordevice comprising: chips each having a semiconductor substrate on whichdevices are integrally formed; and a connecting substrate providedbetween adjacent two of said chips which are vertically arranged,wherein a through-hole is formed in the connecting substrate, and aconductive plug is formed in the through-hole, each of the verticallyadjacent two chips is electrically connected to the conductive plug viabumps, and the connecting substrate has heating units for heating thebumps.
 97. The multichip semiconductor device according to claim 96,wherein a wiring multilayer is formed in the connecting substrate. 98.The multichip semiconductor according to claim 96, wherein saidconnecting substrate is formed of an insulating material, and acapacitor is formed within the connecting substrate, the capacitorhaving a first capacitor electrode formed of a power line, a secondcapacitor electrode formed of a ground line, and a capacitor insulatingfilm formed of the connecting substrate.
 99. A multichip semiconductordevice comprising: chips each having a semiconductor substrate on whichdevices are integrally formed; and a connecting substrate providedbetween adjacent two of said chips which are vertically arranged,wherein a through-hole is formed in the connecting substrate, and aconductive plug is formed in the through-hole, the vertically adjacenttwo chips are electrically connected to each other via the conductiveplug, and the connecting substrate is formed of a material having athermal expansivity substantially equal to a thermal expansivity of eachsemiconductor substrate.
 100. The multichip semiconductor deviceaccording to claim 99, wherein the connecting substrate has higherradiation properties than each chip.
 101. The multichip semiconductordevice according to claim 99, wherein a difference between the thermalexpansivity of the material of the connecting substrate and the thermalexpansivity of the material of each semiconductor substrate is within±5.0×10⁻⁶.
 102. A multichip semiconductor device including a pluralityof chips stacked on each other, each of the chips having a semiconductorsubstrate on which circuit components are formed, wherein two adjacentchips included in the plurality of chips are electrically connected toeach other via a connecting substrate provided between the two adjacentchips, a through hole is formed in the semiconductor substrate, and aconductive plug formed in the through hole is connected to theconnecting substrate.
 103. The multichip semiconductor device accordingto claim 102, wherein the connecting substrate has a conductive plugformed in a through hole, conductive plugs included in the two adjacentchips are electrically connected to the conductive plug in theconnecting substrate and the connecting substrate has a heat radiationproperty higher than heat radiation properties of the plurality ofchips.
 104. The multichip semiconductor device according to claim 102,wherein the connecting substrate is made of a material having a heatradiation property higher than heat radiation properties of a materialof the plurality of chips.
 105. The multichip semiconductor deviceaccording to claim 102, wherein the connecting substrate comprises aconnecting substrate body, and a thermal conductive member having ahigher thermal conductivity than the connecting substrate body.
 106. Themultichip semiconductor device according to claim 105, wherein thethermal conductive member is a conductive plate formed in the connectingsubstrate body.
 107. The multichip semiconductor device according toclaim 105, wherein the thermal conductive member is a radiation filmprovided on the surface of the connecting substrate body.
 108. Themultichip semiconductor device according to claim 103, wherein amultichip layer interconnection is formed in the connecting substrate.109. The multichip semiconductor device according to claim 103, whereinthe connecting substrate is formed of an insulating material and acapacitor is formed within the connecting substrate, the capacitorincluding a first capacitor electrode formed of a power supply line, asecond capacitor electrode formed of a ground line, and a capacitorinsulating film formed of the connecting substrate.
 110. The multichipsemiconductor device according to claim 102, wherein the connectingsubstrate has a conductive plug formed in a through hole, conductiveplugs included in the two adjacent chips are electrically connected tothe conductive plug in the connecting substrate and a material of theconnecting substrate has substantially the same thermal expansioncoefficient as a material of the semiconductor substrate.
 111. Themultichip semiconductor device according to claim 110, wherein adifference between the thermal expansion coefficient of the material ofthe connecting substrate and the thermal expansion coefficient of thematerial of the semiconductor substrate is with +5.0×10⁻⁶.
 112. Amultichip semiconductor device including a plurality of chips stacked oneach other, each of the chips having a semiconductor substrate having asurface on which circuit components are formed and an interlayerinsulating film formed on the surface of the semiconductor substrate,wherein the plurality of chips have a first connect plug made of metal,formed in a through hole which passes through the semiconductorsubstrate and the interlayer insulating film and electrically connectedto another chip and a second connect plug formed in a thorough holewhich passes thorough the semiconductor substrate and the interlayerinsulating film for heat radiation.
 113. A method of forming a chip foruse in a multichip semiconductor device comprising: forming circuitcomponents on a surface of a semiconductor substrate; forming a firstinterlayer insulating film on the surface of the semiconductorsubstrate; selectively etching the first interlayer insulating film andthe semiconductor substrate to form a hole that passes through the firstinterlayer insulating film but not through the semiconductor substrate;forming a first insulating film on a sidewall and bottom of the hole toa thickness that does not fill up the hole; filling the hole with asecond insulating film having a higher etching rate than the firstinsulating film; forming a contact hole in the first interlayerinsulating film, and forming an interconnection layer that connects withthe circuit components through the contact hole; processing a rear sideof the semiconductor substrate and the first insulating film to exposethe second insulating film at a bottom of the hole; and selectivelyetching away the second insulating film in the hole, and filling thehole covered with the first insulating film with a metal to form a metalplug; forming a second interlayer insulating film on the metal plug,wherein the first interlayer insulating film has a first metalinterconnection which is connected with one of the formed circuitcomponents, the second interlayer insulating film has a second metalinterconnection which passes through the second interlayer insulatingfilm and which is connected with a portion of the metal plug and an areaof the portion is smaller than a cross-sectional area of the metal plug.114. The method according to claim 113, wherein the hole is formed priorto the formation of an interconnection layer having the lowest meltingpoint.
 115. The method according to claim 113, wherein the step ofprocessing the rear side of the semiconductor substrate is performedafter the semiconductor substrate is cut out from a wafer.
 116. A methodof forming a chip for use in a multichip semiconductor devicecomprising: forming circuit components on a surface of a semiconductorsubstrate; forming a first interlayer insulating film on the surface ofthe semiconductor substrate; selectively etching the first interlayerinsulating film and the semiconductor substrate to form a hole thatpasses through the first interlayer insulating film but not through thesemiconductor substrate; forming an insulating film on a sidewall andbottom of the hole to a thickness that does not fill up the hole;burying the hole covered with the insulating film with a metal plug thatis formed in advance independently of the semiconductor substrate; andprocessing a rear side of the semiconductor substrate and the insulatingfilm to expose the metal plug at the bottom of the hole.
 117. The methodaccording to claim 116, further comprising: forming a second interlayerinsulating film on the metal plug, wherein the first interlayerinsulating film has a first metal interconnection which is connectedwith one of the formed circuit components, the second interlayerinsulating film has a second metal interconnection which passes throughthe second interlayer insulating film and which is connected with aportion of the metal plug and an area of the portion is smaller than across-sectional area of the metal plug.
 118. The method according toclaim 116, wherein the metal plug is formed in a groove in a surface ofa substrate different from the semiconductor substrate, and is thentaken out of the groove and buried in the hole.